Resized Large Diameter Quartz Silica Glass Diffusion Tube for Semiconductor

• Customization: Available
• Certification: CE, ISO
• Application: Chemical, Glass, Semiconductor
• Model NO.: PQ181E; PQ181E H; PQ181E-R; PQ181EH-R
• Type: Diffusion Tube
• Oh Content: 10-30ppm
• Working Temperature: 1150
• Transport Package: Wood Case
• Specification: quartz sand
• Trademark: PQ
• Origin: China
• Package Size: 100.00cm * 100.00cm * 74.00cm
• Package Gross Weight: 50.000kg

Product Description

Application
Semiconductor grade quartz tube is widely used in the oxidation and diffusion process in semiconductor wafer manufacturing.
Product Feature
Semiconductor grade quartz tube features high purity, low hydroxyl and high temperature resistance, etc.
Typical Size

OD Range	OD Tolerance	WT Tolerance	Sliding	Ovality	Bow
OD<100.00	±1.00	±10.00%	15.00%	1.00%	0.10%
100.00≤OD<200.00	±1.00	±10.00%	15.00%	1.00%	0.10%
200.00≤OD<300.00	±1.00	±10.00%	15.00%	1.00%	0.10%
300.00≤OD<400.00	±1.00	±10.00%	15.00%	1.00%	0.10%
400.00≤OD<500.00	±1.00	±10.00%	15.00%	1.00%	0.10%
500.00≤OD<900.00	±2.00	±10.00%	15.00%	1.00%	0.10%

Physical & Chemical properties
  i. Trace elements                                  Unit:ppm

Code	Criteria	Al	Ca	Cr	Cu	Fe	K	Li	Mg	Mn	Na	Ti	Zr
PQ181E PQ181E-R	Typical	13	0.5	<0.05	<0.05	0.1	0.1	0.3	0.05	0.05	0.1	1.3	1
	Maximum	19	1	0.1	0.1	0.5	1	1	0.2	0.2	1	2	2
PQ181EH PQ181EH-R	Typical	8	0.6	<0.05	<0.01	0.1	0.1	0.2	0.05	0.05	0.1	1.3	1
	Maximum	10	1	0.1	<0.01	0.5	0.5	0.5	0.2	0.2	0.5	2	2

Note: PQ181E-R/PQ181EH-R is semiconductor grade resized tube.

ii. OH Content                                      

PQ181E/ PQ181EH

OH<10ppm

PQ181E-R/ PQ181EH-R

OH<30ppm

iii. Physical properties

Item	Index Value
Density(g/cm^3)	2.2
Heat Conductivity(w/m·k,1000ºC)	2.28
Coefficient of Thermal Expansion(ºC^-1,1000ºC)	5.5×10^-7
Softening Point(ºC)	1670
Annealing Point(ºC)	1210
Strain Point(ºC)	1110

1. Product has been certified TEL, LAM, AMAT ;
2. Located in quartz hometown of China
3. Purity of SiO2 can reach to 99.995-99.999%
4. Full quartz products, supply for lighting, solar, optics, optical fiber, semiconductor and etc.

FAQ:

Q1. How can I get a sample to check your quality?
After price confirmation, you can require for samples to check our quality.
Q2. Which payment form you can accept?
A: T/T
Q3. Can I request to advance the shipment?
A: We can discuss with other customers and try to move up earlier.
Q4. Which shipping way can you provide?
A: We can provide shipping by sea, by air and by express.
Q5: What's your after-sale service?
A: Our quality warranty period is one year. Any quality problem will be solved to customer satisfactions.